Maskless parallel patterning with zone plate array lithography (ZPAL)
Author(s)
Gil, Darío, 1975-
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Other Contributors
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Advisor
Henry I. Smith.
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Metadata
Show full item recordDescription
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000. Includes bibliographical references (p. 147-150).
Date issued
2000Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.