Zone Plate Array Lithography (ZPAL) : simulations and system design
Name
46922291-MIT.pdf
Description
Full printable version
Size
6.76 MB
Format
Adobe PDF
Checksum (MD5)
470257a8ee37b30cc73653cdbed48c0a
Author(s)
Menon, Rajesh, 1976-
Advisor(s)
Henry I. Smith.
Alternative Title
ZPAL
Date Issued
2000
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.
Includes bibliographical references (p. 105-109).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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