Zone Plate Array Lithography (ZPAL) : simulations and system design

Author(s)
Menon, Rajesh, 1976-
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Alternative title
ZPAL
Other Contributors
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Advisor
Henry I. Smith.
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Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.
 
Includes bibliographical references (p. 105-109).
 
Date issued
2000
URI
http://hdl.handle.net/1721.1/86545
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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