Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction

Author(s)
Pruette, Laura C. (Laura Catherine), 1974-
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Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Advisor
Rafael Reif.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.
 
Includes bibliographical references (p. 295-301).
 
Date issued
2001
URI
http://hdl.handle.net/1721.1/86668
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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