Device independent process control of dielectric chemical mechanical polishing

Author(s)
Smith, Taber H. (Taber Hardesty)
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Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Advisor
Duane S. Boning.
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Description
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, February 2000.
 
Includes bibliographical references (p. 157-162).
 
Date issued
2000
URI
http://hdl.handle.net/1721.1/87156
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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