SiGe virtual substrate engineering for integration of III-V materials, microelectromechanical systems, and strained silicon MOSFETs with silicon

Author(s)
Currie, Matthew Thomas, 1973-
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Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.
Advisor
Eugene A. Fitzgerald.
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Abstract
 
Description
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2001.
 
Includes bibliographical references (p. 184-191).
 
Date issued
2001
URI
http://hdl.handle.net/1721.1/8784
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering.
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