High-resolution micromachined interferometric accelerometer

Author(s)
Loh, Nin C. (Nin Chin), 1977-
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Other Contributors
Massachusetts Institute of Technology. Department of Mechanical Engineering.
Advisor
George Barbastathis.
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Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001.
 
Includes bibliographical references (p. 74-75).
 
Date issued
2001
URI
http://hdl.handle.net/1721.1/89324
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering.
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