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Calibration of a microvision system for MEMS device characterization

Author(s)
Bardhan, Jaydeep Porter, 1978-
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Alternative title
Calibration of a microvision system for microelectromechanical system device characterization
Other Contributors
Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
Stephen D. Senturia.
Terms of use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
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Abstract
With the growing use of microelectromechanical systems (MEMS), it becomes increasingly important that reliable, accurate methods for characterizing and calibrating MEMS be developed. One microsystem in need of specific characterization measurements is the polychromator, an electrically programmable, surface micromachined diffraction grating. A microvision system has been developed to measure the electromechanical behavior of the polysilicon beams that comprise this device. Proper rigor demands that the system for making characterizations should itself be characterized; its accuracy and precision should be determined, so that users may understand the possible error margins of its measurements. This thesis describes HUMS (Heavily Upsampling Microvision System), the software application developed to automate the characterization of the polychromator, and the method developed to quantify the accuracy of the HUMS application.
Description
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.
 
Includes bibliographical references (leaves 56-57).
 
Date issued
2001
URI
http://hdl.handle.net/1721.1/8934
Department
Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.

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  • Electrical Engineering and Computer Sciences - Master's degree

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