Image grating metrology using a Fresnel zone plate

Author(s)
Joo, Chulmin, 1976-
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Massachusetts Institute of Technology. Department of Mechanical Engineering.
Advisor
Mark L. Schattenburg and George Barbastathis.
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Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.
 
Includes bibliographical references (p. 107-110).
 
Date issued
2003
URI
http://hdl.handle.net/1721.1/89392
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering.
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