A six-degree-of-freedom compliant micro-manipulator for silicon optical bench

Author(s)
Chen, Shih-Chi, 1977-
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Massachusetts Institute of Technology. Department of Mechanical Engineering.
Advisor
Martin L. Culpepper.
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Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.
 
Includes bibliographical references (leaves 111-113).
 
Date issued
2003
URI
http://hdl.handle.net/1721.1/89396
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering.
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