Design and implementation of three-dimensional logic structures

Abstract

In this thesis, a computer-aided-design (CAD) system is developed that assists in the design of novel three-dimensional integrated circuits. The software tools allow for the specification of a multilayer transistor circuit by means that are readily accessible to those familiar with two-dimensional CMOS VLSI design. This software system provides desirable features such as SPICE circuit extraction and the ability to produce the design formats necessary for automated fabrication (e.g. mask specifications for lithography or Gerber data for inkjet printing). Finally, in this thesis, the software tools are used to design a ring oscillator, a 3-D static RAM, and a 3-D cellular automata machine.