dc.contributor.author | Weinstein, Dana | |
dc.contributor.author | Popa, Laura Cornelia | |
dc.date.accessioned | 2014-10-21T15:04:40Z | |
dc.date.available | 2014-10-21T15:04:40Z | |
dc.date.issued | 2013-06 | |
dc.identifier.isbn | 978-1-4673-5983-2 | |
dc.identifier.uri | http://hdl.handle.net/1721.1/91021 | |
dc.description.abstract | This work presents a new switching mechanism in piezoelectric transduction of AlGaN/GaN bulk acoustic resonators. A piezoelectric transducer is formed in the AlGaN, between a top Schottky electrode and a 2D electron gas (2DEG) as a second electrode. In the off state, this 2DEG can be depleted by applying a negative bias to the top electrode, suppressing transduction and reducing capacitive loading. Switchable AlGaN/GaN resonators are demonstrated from 240MHz to 3.5GHz with frequency-quality factor products up to 1.7×10[superscript 12] in air. Switching is shown in both devices with passive piezoelectric and HEMT sensing, with >19dB suppression in the off state. | en_US |
dc.language.iso | en_US | |
dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) | en_US |
dc.relation.isversionof | http://dx.doi.org/10.1109/Transducers.2013.6627304 | en_US |
dc.rights | Creative Commons Attribution-Noncommercial-Share Alike | en_US |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-sa/4.0/ | en_US |
dc.source | MIT web domain | en_US |
dc.title | Switchable piezoelectric transduction in AlGaN/GaN MEMS resonators | en_US |
dc.type | Article | en_US |
dc.identifier.citation | Popa, Laura C., and Dana Weinstein. “Switchable Piezoelectric Transduction in AlGaN/GaN MEMS Resonators.” 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) (June 2013). | en_US |
dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | en_US |
dc.contributor.department | Massachusetts Institute of Technology. Department of Physics | en_US |
dc.contributor.mitauthor | Popa, Laura Cornelia | en_US |
dc.contributor.mitauthor | Weinstein, Dana | en_US |
dc.relation.journal | Proceedings of the 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) | en_US |
dc.eprint.version | Author's final manuscript | en_US |
dc.type.uri | http://purl.org/eprint/type/ConferencePaper | en_US |
eprint.status | http://purl.org/eprint/status/NonPeerReviewed | en_US |
dspace.orderedauthors | Popa, Laura C.; Weinstein, Dana | en_US |
mit.license | OPEN_ACCESS_POLICY | en_US |
mit.metadata.status | Complete | |