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dc.contributor.authorWeinstein, Dana
dc.contributor.authorPopa, Laura Cornelia
dc.date.accessioned2014-10-21T15:04:40Z
dc.date.available2014-10-21T15:04:40Z
dc.date.issued2013-06
dc.identifier.isbn978-1-4673-5983-2
dc.identifier.urihttp://hdl.handle.net/1721.1/91021
dc.description.abstractThis work presents a new switching mechanism in piezoelectric transduction of AlGaN/GaN bulk acoustic resonators. A piezoelectric transducer is formed in the AlGaN, between a top Schottky electrode and a 2D electron gas (2DEG) as a second electrode. In the off state, this 2DEG can be depleted by applying a negative bias to the top electrode, suppressing transduction and reducing capacitive loading. Switchable AlGaN/GaN resonators are demonstrated from 240MHz to 3.5GHz with frequency-quality factor products up to 1.7×10[superscript 12] in air. Switching is shown in both devices with passive piezoelectric and HEMT sensing, with >19dB suppression in the off state.en_US
dc.language.isoen_US
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/Transducers.2013.6627304en_US
dc.rightsCreative Commons Attribution-Noncommercial-Share Alikeen_US
dc.rights.urihttp://creativecommons.org/licenses/by-nc-sa/4.0/en_US
dc.sourceMIT web domainen_US
dc.titleSwitchable piezoelectric transduction in AlGaN/GaN MEMS resonatorsen_US
dc.typeArticleen_US
dc.identifier.citationPopa, Laura C., and Dana Weinstein. “Switchable Piezoelectric Transduction in AlGaN/GaN MEMS Resonators.” 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) (June 2013).en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Scienceen_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Physicsen_US
dc.contributor.mitauthorPopa, Laura Corneliaen_US
dc.contributor.mitauthorWeinstein, Danaen_US
dc.relation.journalProceedings of the 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)en_US
dc.eprint.versionAuthor's final manuscripten_US
dc.type.urihttp://purl.org/eprint/type/ConferencePaperen_US
eprint.statushttp://purl.org/eprint/status/NonPeerRevieweden_US
dspace.orderedauthorsPopa, Laura C.; Weinstein, Danaen_US
mit.licenseOPEN_ACCESS_POLICYen_US
mit.metadata.statusComplete


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