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Magnetic bearing stages for electron beam lithography

dc.contributor.advisorDavid L. Trumper.en_US
dc.contributor.authorKonkola, Paul Thomas, 1973-en_US
dc.contributor.otherMassachusetts Institute of Technology. Dept. of Mechanical Engineering.en_US
dc.date.accessioned2005-08-22T20:15:53Z
dc.date.available2005-08-22T20:15:53Z
dc.date.copyright1998en_US
dc.date.issued1998en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/9315
dc.descriptionThesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.en_US
dc.descriptionIncludes bibliographical references (p. 217-220).en_US
dc.description.statementofresponsibilityby Paul Thomas Konkola.en_US
dc.format.extent230 p.en_US
dc.format.extent14041316 bytes
dc.format.extent14041076 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582
dc.subjectMechanical Engineering.en_US
dc.titleMagnetic bearing stages for electron beam lithographyen_US
dc.typeThesisen_US
dc.description.degreeS.M.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Mechanical Engineering
dc.identifier.oclc44021880en_US


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