| dc.contributor.advisor | David L. Trumper. | en_US |
| dc.contributor.author | Konkola, Paul Thomas, 1973- | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Dept. of Mechanical Engineering. | en_US |
| dc.date.accessioned | 2005-08-22T20:15:53Z | |
| dc.date.available | 2005-08-22T20:15:53Z | |
| dc.date.copyright | 1998 | en_US |
| dc.date.issued | 1998 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/9315 | |
| dc.description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. | en_US |
| dc.description | Includes bibliographical references (p. 217-220). | en_US |
| dc.description.statementofresponsibility | by Paul Thomas Konkola. | en_US |
| dc.format.extent | 230 p. | en_US |
| dc.format.extent | 14041316 bytes | |
| dc.format.extent | 14041076 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Mechanical Engineering. | en_US |
| dc.title | Magnetic bearing stages for electron beam lithography | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | S.M. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Dept. of Mechanical Engineering. | en_US |
| dc.identifier.oclc | 44021880 | en_US |
