Performance measurements of MEMS analysis system

Abstract

Designers and manufacturers of Micro Electromechanical Systems need accurate instruments to examine the mechanical properties of the devices they fabricate. The research presented in this thesis evaluate's the motion detection capabilities of a MEMS Analysis System. The thesis describes two motion detection schemes and the experiments that have been carried out to characterize them. It provides detailed analysis of the results, as well as suggestions as to how to improve each method. Most importantly, however, it establishes a framework in which future performance tests can be based on.