A high-power radio-frequency plasma source
| dc.contributor.author | Petty, C.C. | en_US |
| dc.contributor.author | Smith, D.K. | en_US |
| dc.date.accessioned | 2015-02-19T19:29:09Z | |
| dc.date.available | 2015-02-19T19:29:09Z | |
| dc.date.issued | 2015-02-19 | |
| dc.identifier | 86ja028 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/94896 | |
| dc.publisher | MIT Plasma Science and Fusion Center | en_US |
| dc.title | A high-power radio-frequency plasma source | en_US |
