Precision six degrees of freedom magnetically-levitated photolithography stage

Author(s)
Williams, Mark E. (Mark Edd)
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Advisor
David L. Trumper.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.
 
Includes bibliographical references (leaves 221-225).
 
Date issued
1998
URI
http://hdl.handle.net/1721.1/9850
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering
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