Precision six degrees of freedom magnetically-levitated photolithography stage
Author(s)Williams, Mark E. (Mark Edd)
David L. Trumper.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.Includes bibliographical references (leaves 221-225).
DepartmentMassachusetts Institute of Technology. Department of Mechanical Engineering
Massachusetts Institute of Technology