Novel etch-stop materials for silicon micromachining
Author(s)
Wu, Kenneth Chu-Chao
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Advisor
Eugene A. Fitzgerald.
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Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997. Includes bibliographical references (p. 62-64).
Date issued
1997Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering