Surface kinetic study of ion induced chemical vapor deposition of copper
Author(s)
Chiang, Tony Ping-chen
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Advisor
Herbert H. Swain and Carl V. Thompson. II.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996. Includes bibliographical references (leaves 158-162).
Date issued
1996Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering