Macro-modeling of micro-electrical-mechanical system devices

Author(s)
Wang, Qiutao.
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Advisor
Jacob White.
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
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Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.
 
Includes bibliographical references (leaves 48-50).
 
Date issued
1998
URI
http://hdl.handle.net/1721.1/9917
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering
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