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Development of calibration standards for accurate measurement of geometry in microelectromechanical systems

dc.contributor.advisorStephen D. Senturia.en_US
dc.contributor.authorDeutsch, Erik R. (Erik Robertson), 1974-en_US
dc.date.accessioned2005-08-19T14:26:17Z
dc.date.available2005-08-19T14:26:17Z
dc.date.copyright1998en_US
dc.date.issued1998en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/9945
dc.descriptionThesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.en_US
dc.descriptionIncludes bibliographical references (leaves 45-46).en_US
dc.description.statementofresponsibilityby Erik R. Deutsch.en_US
dc.format.extent48 leavesen_US
dc.format.extent3672086 bytes
dc.format.extent3671844 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582
dc.subjectElectrical Engineering and Computer Scienceen_US
dc.titleDevelopment of calibration standards for accurate measurement of geometry in microelectromechanical systemsen_US
dc.typeThesisen_US
dc.description.degreeM.S.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
dc.identifier.oclc40265284en_US


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