Computer aided macromodeling for MEMS
Author(s)
Gabbay, Lynn Daniel![Thumbnail](/bitstream/handle/1721.1/9955/40336069-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Alternative title
Computer aided macromodeling for microelectromechanical systems
Advisor
Stephen D. Senturia.
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Metadata
Show full item recordDescription
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. Includes bibliographical references (p. 85-87).
Date issued
1998Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science