2026-09-19T04:55:26Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/100732022-01-13T07:54:35Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Alexander H. Slocum.
Chiu, Michael Alec, 1968-
Massachusetts Institute of Technology. Department of Mechanical Engineering
2005-08-19T12:00:00Z
2005-08-19T12:00:00Z
1998
1998
http://hdl.handle.net/1721.1/10073
39241898
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.
Vita.
Includes bibliographical references (p. 291-294).
by Michael Alec Chiu.
Ph.D.
295 p.
20937933 bytes
20937689 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Mechanical Engineering
Roadmap of mechanical systems design for the semiconductor automatic test equipment industry
Thesis
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