2026-09-24T16:03:08Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/104592022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Henry I. Smith.
Franke, Andrea Elke
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-08-18T20:50:24Z
2005-08-18T20:50:24Z
1997
1997
http://hdl.handle.net/1721.1/10459
37658985
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
Includes bibliographical references.
by Andrea Elke Franke.
M.S.
70 leaves
6599953 bytes
6599711 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Fabrication of extremely smooth nanostructures using anisotropic etching
Thesis
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