2026-09-19T18:46:11Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/106822022-01-13T07:54:35Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Duane S. Boning.
Wong, Ka Shun
Massachusetts Institute of Technology. Department of Mechanical Engineering
2005-08-18T17:46:30Z
2005-08-18T17:46:30Z
1996
1996
http://hdl.handle.net/1721.1/10682
36398768
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996.
Includes bibliographical references (p. 132-137).
by Ka Shun Wong.
Ph.D.
146 p.
11069572 bytes
11069325 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Mechanical Engineering
Real-time analysis and control of plasma etching via full wafer interferometry
Thesis
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