2026-09-18T18:54:10Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/106862022-01-13T07:54:35Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Roy E Welsch, Steven D. Eppinger.
Sharma, Vikas
Massachusetts Institute of Technology. Department of Mechanical Engineering
2005-08-18T17:48:12Z
2005-08-18T17:48:12Z
1996
1996
http://hdl.handle.net/1721.1/10686
36398826
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996.
Includes bibliographical references (leaves 120-125).
by Vikas Sharma.
Sc.D.
131 leaves
11239192 bytes
11238953 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Mechanical Engineering
A new modeling methodology combining engineering and statistical modeling methods : a semiconductor manufacturing application
Thesis
application/pdf
Publication
unknown
unknown
<Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="af9dc8e5-8ac1-4f9f-b4ac-b3d7aecc1350">
<Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type>
<Language>eng</Language>
<Title>A new modeling methodology combining engineering and statistical modeling methods : a semiconductor manufacturing application</Title>
<PublishedIn>
<Publication>
</Publication>
</PublishedIn>
<PublicationDate>1996</PublicationDate>
<Authors>
<Author>
<DisplayName>Sharma, Vikas</DisplayName>
<Affiliation>
<OrgUnit>
</OrgUnit>
</Affiliation>
</Author>
</Authors>
<Editors>
</Editors>
<Publishers>
<Publisher>
<DisplayName>Massachusetts Institute of Technology</DisplayName>
<OrgUnit />
</Publisher>
</Publishers>
<License>http://dspace.mit.edu/handle/1721.1/7582</License>
<Keyword>Mechanical Engineering</Keyword>
<Access xmlns="http://purl.org/coar/access_right"
>
</Access>
</Publication>