2026-09-19T20:58:01Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/1089742021-07-05T14:03:20Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Karl K. Berggren.
Zhu, Di, Ph. D. Massachusetts Institute of Technology
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2017-05-11T19:58:40Z
2017-05-11T19:58:40Z
2017
2017
http://hdl.handle.net/1721.1/108974
986497343
Thesis: S.M., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2017.
Cataloged from PDF version of thesis.
Includes bibliographical references (pages 85-91).
With recent advances in integrated single-photon sources and quantum memories, onchip integration of high-performance single-photon detectors becomes increasingly important. The superconducting nanowire single-photon detector (SNSPD) is the leading single-photon counting technology for quantum information processing. Among various waveguide materials, aluminum nitride (AlN) is a promising candidate because of its exceptionally wide bandgap, and intrinsic piezoelectric and electro-optic properties. In this Master's thesis, we developed a complete fabrication process for making high-performance niobium nitride SNSPDs on AlN, and demonstrated their integration with AlN photonic waveguides. The detectors fabricated on this new substrate material have demonstrated saturated detection efficiency from visible to near-IR, sub-60-ps timing jitter, and ~6 ns reset time. This work will contribute towards building a fully integrated quantum photonic processor.
by Di Zhu.
S.M.
91 pages
eng
Massachusetts Institute of Technology
MIT theses are protected by copyright. They may be viewed, downloaded, or printed from this source but further reproduction or distribution in any format is prohibited without written permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science.
Superconducting nanowire single-photon detectors on aluminum nitride photonic integrated circuits
SNSPD on AlN photonic integrated circuits
Thesis
application/pdf
Publication
unknown
unknown
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<Abstract>With recent advances in integrated single-photon sources and quantum memories, onchip integration of high-performance single-photon detectors becomes increasingly important. The superconducting nanowire single-photon detector (SNSPD) is the leading single-photon counting technology for quantum information processing. Among various waveguide materials, aluminum nitride (AlN) is a promising candidate because of its exceptionally wide bandgap, and intrinsic piezoelectric and electro-optic properties. In this Master's thesis, we developed a complete fabrication process for making high-performance niobium nitride SNSPDs on AlN, and demonstrated their integration with AlN photonic waveguides. The detectors fabricated on this new substrate material have demonstrated saturated detection efficiency from visible to near-IR, sub-60-ps timing jitter, and ~6 ns reset time. This work will contribute towards building a fully integrated quantum photonic processor.</Abstract>
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