2026-09-20T03:21:25Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/110972022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Stephen D. Senturia.
Osterberg, Peter Maynard
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-08-17T23:22:31Z
2005-08-17T23:22:31Z
1995
1995
http://hdl.handle.net/1721.1/11097
34097554
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
Includes bibliographical references (leaves 140-143).
by Peter Maynard Osterberg.
Ph.D.
172 leaves
10070063 bytes
10069824 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Electrostatically actuated microelectromechanical test structures for material property measurement
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