2026-09-21T18:38:06Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/112422022-01-13T07:54:32Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
L. Rafael Reif.
Naik, Rajan Sharad
Massachusetts Institute of Technology. Department of Materials Science and Engineering
2005-08-18T12:00:00Z
2005-08-18T12:00:00Z
1996
1996
http://hdl.handle.net/1721.1/11242
34791224
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.
Includes bibliographical references (leaf 43).
by Rajan Sharad Naik.
M.S.
43 p.
2578173 bytes
2577935 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Materials Science and Engineering
Sputter deposition of aluminum nitride for applications in thin-film resonators
Thesis
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