2026-09-19T15:23:22Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/114962022-01-13T07:54:35Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Alexander Slocum.
Van Doren, Matthew J., 1967-
Massachusetts Institute of Technology. Department of Mechanical Engineering
2005-08-17T19:01:25Z
2005-08-17T19:01:25Z
1995
1995
http://hdl.handle.net/1721.1/11496
33434802
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.
Vita.
Includes bibliographical references (p. 293-301).
by Matthew James Van Doren.
Ph.D.
303 p.
19644134 bytes
19643890 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Mechanical Engineering
Precision machine design for the semiconductor equipment manufacturing industry
Thesis
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Publication
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