2026-09-19T09:28:42Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/116172022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Henry I. Smith.
Hector, Scott D. (Scott Daniel)
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-08-16T23:03:03Z
2005-08-16T23:03:03Z
1994
1994
http://hdl.handle.net/1721.1/11617
32052989
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Includes bibliographical references (leaves 263-274).
by Scott D. Hector.
Ph.D.
274 leaves
21256978 bytes
21256732 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments
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