2026-09-19T03:26:26Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/116552022-01-13T07:54:18Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Herbert H. Sawin.
Dalton, Timothy Joseph
Massachusetts Institute of Technology. Department of Chemical Engineering
2005-08-16T23:22:42Z
2005-08-16T23:22:42Z
1994
1994
http://hdl.handle.net/1721.1/11655
32148397
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1994.
Includes bibliographical references (p. 423-441).
by Timothy Joseph Dalton.
Ph.D.
687 p.
33570662 bytes
33570418 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Chemical Engineering
Pattern dependencies in the plasma etching of polysilicon
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