2026-09-19T09:51:47Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/120112022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Rafael Reif.
Zhou, Zen-Hong
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-08-16T21:52:46Z
2005-08-16T21:52:46Z
1994
1994
http://hdl.handle.net/1721.1/12011
31262733
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Includes bibliographical references (p. 170-182).
by Zhen-Hong Zhou.
Ph.D.
182 p.
14400038 bytes
14399798 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Real time in-situ monitoring and control of silicon epitaxy by Fourier transform infrared spectroscopy
Thesis
application/pdf
false
Publication
unknown
unknown
<Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="b2595868-8fb5-4bec-85b8-6da7c91ef885">
<Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type>
<Language>eng</Language>
<Title>Real time in-situ monitoring and control of silicon epitaxy by Fourier transform infrared spectroscopy</Title>
<PublishedIn>
<Publication>
</Publication>
</PublishedIn>
<PublicationDate>1994</PublicationDate>
<Authors>
<Author>
<DisplayName>Zhou, Zen-Hong</DisplayName>
<Affiliation>
<OrgUnit>
</OrgUnit>
</Affiliation>
</Author>
</Authors>
<Editors>
</Editors>
<Publishers>
<Publisher>
<DisplayName>Massachusetts Institute of Technology</DisplayName>
<OrgUnit />
</Publisher>
</Publishers>
<License>http://dspace.mit.edu/handle/1721.1/7582</License>
<Keyword>Electrical Engineering and Computer Science</Keyword>
<Access xmlns="http://purl.org/coar/access_right"
>
</Access>
</Publication>