2026-09-21T01:43:20Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/120132022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Martin A. Schmidt.
McNeil, Vincent Maurice
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-08-16T21:53:39Z
2005-08-16T21:53:39Z
1994
1994
http://hdl.handle.net/1721.1/12013
31267968
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Includes bibliographical references (p. 343-360).
by Vincent Maurice McNeil.
Ph.D.
360 p.
29510438 bytes
29510195 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
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http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
A thin-film silicon microaccelerometer fabricated using electrochemical etch-stop and wafer bonding technology
Thesis
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unknown
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