2026-09-18T19:36:55Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/120202022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
James E. Chung.
Bailey, Troy A
Sloan School of Management
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-08-16T21:56:34Z
2005-08-16T21:56:34Z
1994
1994
http://hdl.handle.net/1721.1/12020
31280652
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994, and Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1994.
Includes bibliographical references (p. [131]-133).
by Troy A. Bailey.
M.S.
133 p.
8367783 bytes
8367543 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Sloan School of Management
Semiconductor cluster tool availability
Thesis
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