2026-09-19T14:43:51Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/120282022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Duane Boning, Charles Fine.
Fitzgerald, Dawn Dougherty
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-08-16T21:59:59Z
2005-08-16T21:59:59Z
1994
1994
http://hdl.handle.net/1721.1/12028
31312048
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Includes bibliographical references (p. 139-140).
by Dawn Dougherty Fitzgerald.
M.S.
140 p.
7154208 bytes
7153969 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Analysis of polysilicon critical dimension variation for submicron CMOS processes
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