2026-09-21T19:17:16Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/120302022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Henry I. Smith.
Ferrera, Juan (Ferrera Uranga)
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-08-16T22:00:48Z
2005-08-16T22:00:48Z
1994
1994
http://hdl.handle.net/1721.1/12030
31317609
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Includes bibliographical references (leaves 75-79).
by Juan Ferrera.
M.S.
79 leaves
6023130 bytes
6022888 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Highly coherent gratings for optoelectronics : an application of spatial-phase-locked electron beam lithography
Thesis
application/pdf
false
Publication
unknown
unknown
<Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="51e0e4fc-9639-4df8-bfb6-15e9d94ff670">
<Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type>
<Language>eng</Language>
<Title>Highly coherent gratings for optoelectronics : an application of spatial-phase-locked electron beam lithography</Title>
<PublishedIn>
<Publication>
</Publication>
</PublishedIn>
<PublicationDate>1994</PublicationDate>
<Authors>
<Author>
<DisplayName>Ferrera, Juan (Ferrera Uranga)</DisplayName>
<Affiliation>
<OrgUnit>
</OrgUnit>
</Affiliation>
</Author>
</Authors>
<Editors>
</Editors>
<Publishers>
<Publisher>
<DisplayName>Massachusetts Institute of Technology</DisplayName>
<OrgUnit />
</Publisher>
</Publishers>
<License>http://dspace.mit.edu/handle/1721.1/7582</License>
<Keyword>Electrical Engineering and Computer Science</Keyword>
<Access xmlns="http://purl.org/coar/access_right"
>
</Access>
</Publication>