2026-09-20T01:33:12Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/120912022-01-26T21:03:31Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Charles H. Fine, Lionel C. Kimerling.
Nickel, Randal T
Massachusetts Institute of Technology. Department of Electrical Engineering
Sloan School of Management
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-08-16T22:28:21Z
2005-08-16T22:28:21Z
1994
1994
http://hdl.handle.net/1721.1/12091
31673904
Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1994, and Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1994.
by Randall T. Nickel.
M.S.
85 leaves
9611491 bytes
9611247 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Sloan School of Management
Electrical Engineering
Improving productivity of semiconductor manufacturing cluster tools
Thesis
application/pdf
false
Publication
unknown
unknown
<Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="11140f00-e78f-4b57-a78d-2e718321d878">
<Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type>
<Language>eng</Language>
<Title>Improving productivity of semiconductor manufacturing cluster tools</Title>
<PublishedIn>
<Publication>
</Publication>
</PublishedIn>
<PublicationDate>1994</PublicationDate>
<Authors>
<Author>
<DisplayName>Nickel, Randal T</DisplayName>
<Affiliation>
<OrgUnit>
</OrgUnit>
</Affiliation>
</Author>
</Authors>
<Editors>
</Editors>
<Publishers>
<Publisher>
<DisplayName>Massachusetts Institute of Technology</DisplayName>
<OrgUnit />
</Publisher>
</Publishers>
<License>http://dspace.mit.edu/handle/1721.1/7582</License>
<Keyword>Sloan School of Management</Keyword>
<Keyword>Electrical Engineering</Keyword>
<Access xmlns="http://purl.org/coar/access_right"
>
</Access>
</Publication>