2026-09-20T13:28:39Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/127272026-06-09T12:24:12Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Martin A. Schmidt.
Huff, Michael Allan
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2007-08-29T18:52:26Z
2007-08-29T18:52:26Z
1993
1993
http://hdl.handle.net/1721.1/12727
28896157
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993.
Includes bibliographical references (v. 2, leaves 429-436).
by Michael Allan Huff.
Ph.D.
2 v. (436 leaves)
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Silicon micromachined wafer-bonded valves
Thesis
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