2026-09-19T08:06:15Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/1298482026-06-06T00:54:44Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Cardinal Warde and Jinxin Fu.
Yeung, Wings T.
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2021-02-19T20:17:25Z
2021-02-19T20:17:25Z
2020
2020
https://hdl.handle.net/1721.1/129848
1237567531
Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, February, 2020
Cataloged from student-submitted PDF of thesis.
Includes bibliographical references (page 75).
Augmented reality waveguides are designed to have grating regions to in-couple, out-couple, and propagate light from a light engine to the user. This thesis develops two reliable systems to qualify manufactured waveguides. The first system determines grating quality by measuring grating pitch and orientation uniformity across grating regions. The system uses scatterometry in Littrow configuration and captures both the reflected zeroth and first order diffracted light. The second system determines the overall quality of a waveguide by measuring the resolution of the device using a Modulation Transfer Function, MTF, technique. MTF is commonly measured using either the line pair method or the slant edge method. This thesis proposes a new method to measure MTF using single pixel illumination and point spread function. Results from the two systems are presented, and the capabilities and limitations of each system are explored.
by Wings T. Yeung.
M.Eng.
M.Eng. Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science
75 pages
eng
Massachusetts Institute of Technology
MIT theses may be protected by copyright. Please reuse MIT thesis content according to the MIT Libraries Permissions Policy, which is available through the URL provided.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science.
Accurate characterization of nanophotonic grating structures
Thesis
application/pdf
2021-02-19T20:16:55Z
Publication
Master
EECS
unknown
unknown
<Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="7558fc35-6955-4d5f-976f-681e34ee88ba">
<Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type>
<Language>eng</Language>
<Title>Accurate characterization of nanophotonic grating structures</Title>
<PublishedIn>
<Publication>
</Publication>
</PublishedIn>
<PublicationDate>2020</PublicationDate>
<Authors>
<Author>
<DisplayName>Yeung, Wings T.</DisplayName>
<Affiliation>
<OrgUnit>
</OrgUnit>
</Affiliation>
</Author>
</Authors>
<Editors>
</Editors>
<Publishers>
<Publisher>
<DisplayName>Massachusetts Institute of Technology</DisplayName>
<OrgUnit />
</Publisher>
</Publishers>
<License>http://dspace.mit.edu/handle/1721.1/7582</License>
<Keyword>Electrical Engineering and Computer Science.</Keyword>
<Abstract>Augmented reality waveguides are designed to have grating regions to in-couple, out-couple, and propagate light from a light engine to the user. This thesis develops two reliable systems to qualify manufactured waveguides. The first system determines grating quality by measuring grating pitch and orientation uniformity across grating regions. The system uses scatterometry in Littrow configuration and captures both the reflected zeroth and first order diffracted light. The second system determines the overall quality of a waveguide by measuring the resolution of the device using a Modulation Transfer Function, MTF, technique. MTF is commonly measured using either the line pair method or the slant edge method. This thesis proposes a new method to measure MTF using single pixel illumination and point spread function. Results from the two systems are presented, and the capabilities and limitations of each system are explored.</Abstract>
<Access xmlns="http://purl.org/coar/access_right"
>
</Access>
</Publication>