2026-09-23T05:27:04Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/130782022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Henry I. Smith.
Yen, Anthony
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-08-15T16:00:41Z
2005-08-15T16:00:41Z
1991
1992
http://hdl.handle.net/1721.1/13078
26329656
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1992.
Includes bibliographical references (leaves 79-87).
by Anthony Yen.
Ph.D.
100 leaves
5924676 bytes
5924434 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Fabrication of large-area 100 nm-period gratings using achromatic holographic lithography
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