2026-09-20T08:30:14Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/131872022-01-13T07:54:18Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Herbert H. Sawin.
Gray, David Charles
Massachusetts Institute of Technology. Department of Chemical Engineering
2005-08-15T16:47:04Z
2005-08-15T16:47:04Z
1992
1992
http://hdl.handle.net/1721.1/13187
26680838
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992.
Includes bibliographical references (p. 376-384).
by David Charles Gray.
Ph.D.
618 p.
32344656 bytes
32344412 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Chemical Engineering
Beam simulation studies of plasma-surface interactions in fluorocarbon etching of Si and SiO2
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