2026-09-19T18:23:23Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/138522022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Henry I. Smith.
Early, Kathleen
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-08-10T23:58:14Z
2005-08-10T23:58:14Z
1991
1991
http://hdl.handle.net/1721.1/13852
24652458
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1991.
Includes bibliographical references (leaves 179-187).
by Kathleen Regina Early.
Ph.D.
187 leaves
12734288 bytes
12734046 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography
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