2026-09-19T01:28:01Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/155762022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Mildred S. Dresselhaus.
Olyha, Robert Stephen
Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-08-05T18:27:22Z
2005-08-05T18:27:22Z
1984
1984
http://hdl.handle.net/1721.1/15576
11758639
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984.
MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING.
Bibliography: leaves 132-143.
by Robert Stephen Olyha, Jr.
M.S.
143, [1] leaves
7326260 bytes
7326017 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science.
Non-contact defect detection in silicon
Thesis
application/pdf
false
Publication
unknown
unknown
<Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="2a8346a4-f9c7-49bb-8c76-09049df6c36f">
<Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type>
<Language>eng</Language>
<Title>Non-contact defect detection in silicon</Title>
<PublishedIn>
<Publication>
</Publication>
</PublishedIn>
<PublicationDate>1984</PublicationDate>
<Authors>
<Author>
<DisplayName>Olyha, Robert Stephen</DisplayName>
<Affiliation>
<OrgUnit>
</OrgUnit>
</Affiliation>
</Author>
</Authors>
<Editors>
</Editors>
<Publishers>
<Publisher>
<DisplayName>Massachusetts Institute of Technology</DisplayName>
<OrgUnit />
</Publisher>
</Publishers>
<License>http://dspace.mit.edu/handle/1721.1/7582</License>
<Keyword>Electrical Engineering and Computer Science.</Keyword>
<Access xmlns="http://purl.org/coar/access_right"
>
</Access>
</Publication>