2026-09-20T03:51:58Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/174052022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Cherkassky, Alexander (Alexander Peter), 1963-
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-06-02T14:46:41Z
2005-06-02T14:46:41Z
1995
1995
http://hdl.handle.net/1721.1/17405
33231086
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
Includes bibliographical references (leaf 47).
by Alexander Cherkassky.
M.S.
47 leaves
1579880 bytes
1579688 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Metrology of thin silicon expitaxial films : determination of epitaxial film thickness by Fourier-transform infra-red spectrometry
Thesis
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