2026-09-21T02:02:53Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/174752022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Leslie A. Kolodziejski.
Lim, Kuo-Yi, 1969-
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-06-02T15:23:22Z
2005-06-02T15:23:22Z
1999
1999
http://hdl.handle.net/1721.1/17475
42665211
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
Includes bibliographical references (p. 189-196).
One-dimensional and two-dimensional photonic bandgap devices have been designed and fabricated using III-V compound semiconductors. The one-dimensional photonic bandgap devices consist of monorail and air-bridge waveguide microcavities, while the two-dimensional photonic bandgap devices consist of light-emitting devices with enhanced extraction efficiency. Fabrication techniques such as gas source molecular beam epitaxy, direct-write electron-beam lithography, reactive ion etching and thermal oxidation of AlxGa1-xAs have been employed. The III-V thermal oxide, in particular, is used as an index confinement material, as a sacrificial material for micromechanical fabrication of the air-bridge microcavity, and in the realization of a wide-bandwidth distributed Bragg reflector ...
by Kuo-Yi Lim.
Ph.D.
196 p.
16071073 bytes
16070879 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
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http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Design and fabrication of one-dimensional and two-dimensional photonic bandgap devices
Thesis
application/pdf
Publication
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unknown
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