2026-09-19T12:54:53Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/175852022-01-13T07:54:36Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Martin Culpepper.
Anderson, Gordon A. B. (Gordon Alexander Brewster), 1977-
Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Massachusetts Institute of Technology. Department of Mechanical Engineering
2005-06-02T16:17:00Z
2005-06-02T16:17:00Z
2003
2003
http://hdl.handle.net/1721.1/17585
53093882
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.
Includes bibliographical references (p. 134-136).
A novel, low-cost positioning stage was constructed using a six-axis compliant mechanism driven by three two-axis electromagnetic actuators. The mechanism's monolithic, planar geometry is easily fabricated with low-cost manufacturing processes (such as waterjet machining). The manipulator tolerates ±1 mm actuator misalignment with less than 0.1% full-scale position error. Measurements over a 100x100x100 nm3 work volume displayed resolution better than the sensing capability, 5nm, and open-loop linearity errors less than 0.005% of the full-scale range (100 [mu]m). Measurements over a 100x100x100 [mu]m3 work volume exhibited linearity errors less than 0.20% full-scale. The mechanism's equilateral symmetry and planar geometry restricted thermal drift rates at start-up to 23nm and 4 [mu]tradians over 30 minutes and 0.1°C temperature change. The manipulator, built for $ 2000 (excluding electronics), was successfully tested in a fiber optic alignment application.
by Gordon A.B. Anderson.
S.M.
151 p.
4168173 bytes
4167982 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Mechanical Engineering.
A six-degree of freedom flexural positioning stage
Thesis
application/pdf
Publication
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unknown
<Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="a4510fe0-348a-421d-836c-876bd701947c">
<Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type>
<Language>eng</Language>
<Title>A six-degree of freedom flexural positioning stage</Title>
<PublishedIn>
<Publication>
</Publication>
</PublishedIn>
<PublicationDate>2003</PublicationDate>
<Authors>
<Author>
<DisplayName>Anderson, Gordon A. B. (Gordon Alexander Brewster), 1977-</DisplayName>
<Affiliation>
<OrgUnit>
</OrgUnit>
</Affiliation>
</Author>
</Authors>
<Editors>
</Editors>
<Publishers>
<Publisher>
<DisplayName>Massachusetts Institute of Technology</DisplayName>
<OrgUnit />
</Publisher>
</Publishers>
<License>http://dspace.mit.edu/handle/1721.1/7582</License>
<Keyword>Mechanical Engineering.</Keyword>
<Abstract>A novel, low-cost positioning stage was constructed using a six-axis compliant mechanism driven by three two-axis electromagnetic actuators. The mechanism's monolithic, planar geometry is easily fabricated with low-cost manufacturing processes (such as waterjet machining). The manipulator tolerates ±1 mm actuator misalignment with less than 0.1% full-scale position error. Measurements over a 100x100x100 nm3 work volume displayed resolution better than the sensing capability, 5nm, and open-loop linearity errors less than 0.005% of the full-scale range (100 [mu]m). Measurements over a 100x100x100 [mu]m3 work volume exhibited linearity errors less than 0.20% full-scale. The mechanism's equilateral symmetry and planar geometry restricted thermal drift rates at start-up to 23nm and 4 [mu]tradians over 30 minutes and 0.1°C temperature change. The manipulator, built for $ 2000 (excluding electronics), was successfully tested in a fiber optic alignment application.</Abstract>
<Access xmlns="http://purl.org/coar/access_right"
>
</Access>
</Publication>