2026-09-19T15:02:01Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/180542022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Henry I. Smith.
Patel, Amil Ashok, 1979-
Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-06-02T19:47:31Z
2005-06-02T19:47:31Z
2004
2004
http://hdl.handle.net/1721.1/18054
57384404
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004.
Includes bibliographical references (p. 75-77).
The research presented in this paper aims to build a Zone-Plate-Array Lithography (ZPAL) prototype tool that will demonstrate the high-resolution, parallel patterning capabilities of the architecture. The experiment will require the integration of micromechanical spatial light modulators with an existing zone-plate-array testbed lithography tool. The system development requires an efficient data-delivery system to promote throughput and a thoughtful optical channel to optimize the lithographic performance of zone-plates. Lithography results obtained from the prototype will be presented along with basic performance characteristics.
by Amil Ashok Patel.
S.M.
77 p.
4461842 bytes
4469984 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science.
The development of a prototype Zone-Plate-Array Lithography (ZPAL) system
Thesis
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