2026-09-19T16:36:41Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/326632022-01-13T07:54:32Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Henry I. Smith.
Yasaka, Anto
Massachusetts Institute of Technology. Department of Materials Science and Engineering
2006-05-15T20:19:54Z
2006-05-15T20:19:54Z
1995
1995
http://hdl.handle.net/1721.1/32663
33976490
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
Includes bibliographical references (leaves 66-68).
by Anto Yasaka.
M.S.
68 leaves
3530072 bytes
3532314 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Materials Science and Engineering
Feasibility study of spatial-phase-locked focused-ion-beam lithography
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