2026-09-19T18:46:14Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/340592022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Henry I. Smith.
Owen, Gabrielle M. (Gabrielle Marie)
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2006-09-28T14:56:19Z
2006-09-28T14:56:19Z
1994
1994
http://hdl.handle.net/1721.1/34059
31163454
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Includes bibliographical references (leaves 60-61).
by Gabrielle M. Owen.
M.Eng.
69 leaves
2873835 bytes
2876648 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Optical and mechanical characterization of thin membranes for X-ray lithography
Thesis
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Publication
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unknown
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