2026-09-19T14:39:46Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/360442022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Stephen D. Senturia.
Wu, SunMan Patrick
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2007-02-21T11:09:01Z
2007-02-21T11:09:01Z
1995
1995
http://hdl.handle.net/1721.1/36044
33343495
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
Includes bibliographical references (leaf 38).
by SunMan Patrick Wu.
M.Eng.
88 leaves
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Modeling of micro-electro-mechanical integrated test structures
Thesis
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