2026-09-19T01:14:05Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/366772022-01-13T07:54:36Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Kamal Youcef-Toumi.
Chiu, Cheng-Jung
Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Massachusetts Institute of Technology. Department of Mechanical Engineering
2007-03-12T17:43:28Z
2007-03-12T17:43:28Z
1995
1995
http://hdl.handle.net/1721.1/36677
46972935
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.
Includes bibliographical references (p. 176-177).
New developments on the nanoscale are taking place rapidly in many fields. Instrumentation used to measure and understand the geometry and property of the small scale structure is therefore essential. One of the most promising devices to head the measurement science into the nanoscale is the scanning probe microscope. A prototype of a nanoscale profilometer based on the scanning probe microscope has been built in the Laboratory for Manufacturing and Productivity at MIT. A sample is placed on a precision flip stage and different sides of the sample are scanned under the SPM to acquire its separate surface topography. To reconstruct the original three dimensional profile, many techniques like digital filtering, edge identification, and image matching are investigated and implemented in the computer programs to post process the data, and with greater emphasis placed on the nanoscale application. The important programming issues are addressed, too. Finally, this system's error sources are discussed and analyzed.
by Cheng-Jung Chiu.
M.S.
177 p.
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Mechanical Engineering.
Data processing in nanoscale profilometry
Thesis
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